[논문]Intrinsic amorphous and microcrystalline siliconby hot-wire-deposition for thin films solar cell applications
Intrinsic amorphous and microcrystalline silicon by hot-wire-deposition for thin film solar cell applications Stefan Kleina,b,*, Friedhelm Fingera, Reinhard Cariusa, Heribert Wagnera, Martin Stutzmannb aInstitut fu¨r Photovoltaik, Forschungszentrum Ju¨lich, 52425 Ju¨lich, Germany bWalter Schottky Institut, Technische Universita¨ t Mu¨nchen, Am Coulombwall, 85748 Garching, Germany Abstract The in..
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